The Hefei Photomask Project (also known as the “Heguang Photomask Project”), an EPC turnkey project located in the Xinqiao Science and Technology Innovation Demonstration Zone of the Hefei Economic and Technological Development Zone, is a key integrated circuit industry project in Anhui Province. It is funded by Heguang Photomask Technology (Anhui) Co., Ltd. and constructed by No. 11 Technology under an EPC contract. The project has a total investment of approximately 5.01 billion yuan, covers an area of 49.5 mu, and has a total floor area of approximately 33,500 square meters. The contract was awarded in September 2023, with the main structure topping out in May 2024 and production scheduled to begin in 2025. Construction includes high-standard cleanrooms, a power center, and supporting facilities. The project focuses on the mass production of i-line and KrF photomasks while laying the groundwork for ArF technology. With a planned monthly production capacity exceeding 100,000 wafers, the facility will, upon completion, fill the domestic capacity gap for high-end photomasks and support the independent and controllable development of Hefei’s entire integrated circuit industry chain.